Printable Single-Crystal Silicon Micro/Nanoscale Ribbons, Platelets and Bars Generated from Bulk Wafers

نویسندگان

  • Alfred J. Baca
  • Matthew A. Meitl
  • Heung Cho Ko
  • Shawn Mack
  • Hoon-Sik Kim
  • Jingyan Dong
  • Placid M. Ferreira
  • John A. Rogers
چکیده

Printable or solution processable semiconductor materials have attracted significant attention recently due to their potential to enable cost effective, non-vacuum based fabrication approaches for large area electronics, often referred to as macroelectronics, and particularly to systems that use low cost plastic substrates. Several classes of semiconducting small molecule and polymer materials have been demonstrated as active layers in thin film electronics for displays, sensors and other devices on plastic substrates. While these organic semiconducting materials have some promise for these and other applications such as radio frequency identification tags, the moderate device performance and uncertain reliability represent challenges, especially for demanding applications. An emerging direction for research in this field focuses on the possibility of replacing these organic semiconductors with inorganic materials in various forms, ranging from low temperature or laser annealed polycrystalline thin films, to single crystal semiconductor wires or ribbons. Two different methods can be used to create the wires/ribbons. The first, known as a bottom-up approach, uses direct chemical synthesis of these elements from vapor or liquid phase molecular precursors with or without the use of size selected catalysts. The second, known as a top-down approach, uses specialized lithographic and etching procedures to create the wires/ribbons from bulk wafers or wafers with thin film stacks on their surfaces. The bottom-up approaches can create an impressive variety of structures, including nanoribbons, nanomembranes, nanowires, and multicomponent heterostructured nanoelements. These objects can be used individually or collectively as active layers for high-perfor-

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تاریخ انتشار 2007